M50-12 Advanced Semiconductor Microscope
The Fein Optic M50-12 Advanced Semiconductor Microscope system is tailored for demanding inspection, metrology, and analysis of MEMS and Semiconductor devices in the wafer fabrication process. The M50-12 allows for observation in brightfield, darkfield, polarization, and DIC methods; and supports up to 300mm diameter wafers and 17 inches / 432mm of Flat Panel Display inspection. With a variety of objective lenses available, multiple stage sizes, and fully automated solutions including optional SDK for OEM system integration, the M50-12 can be customized to meet all aspects of your application.
| Optical System | Infinity Color Corrected Optical System |
| Observation | Brightfield, Darkfield, Polarization, DIC |
| Viewing Head | Ergonomic tilting trinocular super widefield head, upright and erect image, adjustable from 5-35°. Beam splitting ratio: 100:0 or 20:80. Interpupillary distance adjustable from 50mm – 76mm. |
| Eyepieces | High eyepoint WF PL10x / 25mm, with adjustable diopter. Accepts 27mm diameter reticle. |
| Objectives | Infinity Corrected LWD Brightfield Plan Achromat 5x, 10x, 20x, 50x, 100x. |
| Infinity Corrected High Resolution Brightfield Semi Apo 5x, 10x, 20x, 50x, 100x. | |
| Infinity Corrected LWD BD Plan Achromat Objectives 5x, 10x, 20x, 50x, 100x. | |
| Infinity Corrected BD Semi Apochromat Objectives 5x, 10x, 20x, 50x, 100x. | |
| Infinity Corrected BD Plan Semi Apochromat Objectives 20x, 50x, 50x, 100x, 100x. | |
| Nosepiece | Motorized Brightfield / Darkfield Sextuple nosepiece with DIC slot. |
| Focus Adjustment | Options for Manual fine/coarse focus; Motorized Focus; Motorized Auto Focus. Optional real-time laser tracking autofocus is available. Low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm. Upper limit and tension adjustment. Built-in 100~240V wide voltage system. |
| Frame | Reflected light frame or Transmitted Reflected light frame. |
| Stage | Manual 305mm x 305mm |
| Motorized 302mm x 302mm | |
| 12″ wafer holder | |
| FPD Support | Supports 17″ of Flat Panel Displays |
| Wafer Support | Supports up to a 300mm Wafer |
| Illumination | 10W LED Brightfield/Darkfield reflected illuminator, electronic variable aperture and field diaphragm, center adjustable; switch for changing between BF/DF; slots for filters and polarizing kit. |
| Filters and Attachments | IF550 Yellow filter for photoresist inspection applications. Polarizing kit, Interference filers, DIC prism |
| C-Mount Adapter | 0.5x, 0.65x, 1x C-Mount Adapters. |