M68 Advanced Semiconductor Microscope
The Fein Optic M68 Advanced Semiconductor Microscope system is tailored for demanding inspection, metrology, and analysis of MEMS and Semiconductor devices in the wafer fabrication process. The M68 allows for observation in brightfield, darkfield, polarization, and DIC methods and supports up to a 200mm diameter wafer and 11 inches / 279.4mm of Flat Panel Display. With a wide variety of objective lenses available, multiple stage sizes, and fully automated solutions including optional SDK for OEM integration of motorized options, the M68 can be customized to meet all aspects of your application.
| Optical System | Infinity Color Corrected Optical System |
| Observation | Brightfield, Darkfield, Polarization, DIC |
| Viewing Head | Ergonomic tilting trinocular head, upright and erect image, adjustable from 5-35°. Beam splitting ratio: 100:0 or 0:100. Interpupillary distance adjustable from 50mm – 76mm. |
| Eyepieces | High eyepoint WF PL10x / 23mm, with adjustable diopter. Accepts 26mm diameter reticle. |
| Objectives | Infinity Corrected LWD Brightfield Plan Achromat 5x, 10x, 20x, 50x, 100x. |
| Infinity Corrected High Resolution Brightfield Semi Apo 5x, 10x, 20x, 50x, 100x. | |
| Infinity Corrected LWD BD Plan Achromat Objectives 5x, 10x, 20x, 50x, 100x. | |
| Infinity Corrected BD Semi Apochromat Objectives 5x, 10x, 20x, 50x, 100x. | |
| Infinity Corrected BD Plan Semi Apochromat Objectives 20x, 50x, 50x, 100x, 100x. | |
| Nosepiece | Motorized Brightfield / Darkfield Sextuple nosepiece with DIC slot. |
| Focus Adjustment | Options for Manual fine/coarse focus; Motorized Focus; Motorized Auto Focus. Optional real-time laser tracking autofocus is available. Low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm. Upper limit and tension adjustment. Built-in 100~240V wide voltage system. |
| Frame | Reflected light frame or Transmitted Reflected light frame. |
| Stage | Manual 158mm x 158mm |
| Manual 210mm x 210mm | |
| Motorized 154mm x 154mm | |
| Motorized 255mm x 215mm | |
| 6″ and 8″ wafer holder | |
| FPD Support | Supports 11″ of Flat Panel Displays |
| Wafer Support | Supports up to a 200mm Wafer |
| Illumination | 10W LED Brightfield/Darkfield reflected illuminator, electronic variable aperture and field diaphragm, center adjustable; switch for changing between BF/DF; slots for filters and polarizing kit. |
| Filters and Attachments | IF550 Yellow filter for photoresist inspection applications. Polarizing kit, Interference filers, DIC prism. |
| C-Mount Adapter | 0.5x, 0.65x, 1x C-Mount Adapters. |