M50RX Metallurgical Wafer Inspection Microscope
The Fein Optic M50RX metallurgical semiconductor wafer inspection microscope features a high intensity LED fiber optic illuminator. The stand can accommodate sample heights up to 250mm. Stage measures 340mm x 350mm. Observation techniques include brightfield, darkfield, polarization, and DIC. A variety of objective lenses are available.
| Optical System | Infinity Color Corrected Achromatic Optical System |
| Observation | Brightfield, Darkfield, Polarization, DIC |
| Viewing Head | 30° Inclined trinocular viewing head, erect image. Splitting ration: 100:0 or 0:100. Interpupillary distance adjustable from 50mm – 76mm. |
| Eyepieces | High eyepoint WF PL10x / 22mm, diopter adjustable. |
| High eyepoint WF PL10x / 25mm, diopter adjustable. | |
| Objectives | Infinity Corrected High Resolution Brightfield Semi Apochromat 5x, 10x, 20x, 50x, 100x. |
| Infinity Corrected High Resolution Brightfield/Darkfield Semi Apochromat 5x, 10x, 20x, 50x, 100x. | |
| Nosepiece | Quintuple nosepiece with DIC slot. |
| Brightfield/Darkfield quintuple nosepiece with DIC slot. | |
| Focus Adjustment | Coaxial coarse and fine focus mechanism, coarse range: 45mm, fine precision: 0.002mm. |
| Body | Lead screw drive with lifting gear. Total travel 210mm with maximum sample height of 250mm and minimum height of 35mm. |
| Stage | Rugged metal stage with large surface area measures 340mm x 350mm. |
| Illumination | High intensity LED fiber optic illuminator with on board thermal sensors, 80W, 25,000 hours lifetime. Auto voltage sensing power supply 96~264VAC, 50-60Hz. |
| Polarization | Analyzer and 360° rotatable polarizer. |
| C-Mount Adapter | 0.5x, 0.65x, 1x C-Mount Adapters. |